论文信息 - Scattering loss reduction in ZnO optical waveguides by laser annealing

Scattering loss reduction in ZnO optical waveguides by laser annealing

We report successful laser annealing of ZnO optical waveguides deposited on an amorphous SiO2 layer thermally grown on Si. A significant improvement in the optical attenuation of the fundamental mode from several dB/cm before laser annealing to as low as 0.01 dB/cm after laser annealing is observed. Scattering loss measurements for the m = 1 and m = 2 mode are also reported. We attribute the reduction in loss primarily to an improvement in the quality of the ZnO film in the region near the ZnO‐SiO2 interface.

J. Boyd | S. Dutta | H. Jackson | F. Hickernell | R. Davis

[1] J. Hammer,et al. Scattering in ZnO-Sapphire Optical Waveguides. , 1975, Applied optics.

[2] F. Hickernell,et al. Zinc-oxide thin-film surface-wave transducers , 1976, Proceedings of the IEEE.

[3] Melvin Lax,et al. Temperature rise induced by a laser beam , 1977 .

[4] Melvin Lax,et al. Temperature rise induced by a laser beam II. The nonlinear case , 1978 .

[5] T. Shiosaki,et al. As‐grown CVD ZnO optical waveguides on sapphire , 1978 .

[6] H. Philipp. The infrared optical properties of SiO2 and SiO2 layers on silicon , 1979 .

[7] Optical properties of single‐crystalline ZnO film smoothly chemical‐vapor deposited on intermediately sputtered thin ZnO film on sapphire , 1979 .

[8] Tsuneo Mitsuyu,et al. Structures and SAW properties of rf‐sputtered single‐crystal films of ZnO on sapphire , 1980 .

[9] Joseph T. Boyd,et al. Reduction of scattering from a glass thin‐film optical waveguide by CO2 laser annealing , 1980 .