Research of Fabricating High-density Genechip by Photolithography Technology

Genechip is a hot new biotechnique developed rapidly in recent years. Genechip adopt photolithography technology of microelectronic technology in IC to fabricate high - desity genechip about glass substrate, it can bind thousands of oligonucleotide probe with surface of solid support. Genechip possesses the features of high - throughout, parallel, minimization and automation.