Waveguide microinterferometry system for microelements investigation

In this paper the measurement concept based on full-field optical methods is presented. In order to fulfil most of the requirements connected with advanced micro element and micro material testing a waveguide micro interferometer based on grating interferometry method is proposed and described in details. The modification of this system for 3D-displacement measurements is presented. The applicability of the micro interferometer is shown at the examples of silicon beam and micro membranes testing.