Copper electrodeposition from an acidic plating bath containing accelerating and inhibiting organic additives
暂无分享,去创建一个
M. A. Pasquale | A. Arvia | L. Gassa | A. J. Arvia | Liliana M. Gassa | M. Pasquale | Alejandro Jorge Arvia
[1] A. Bard,et al. The Decomposition of the Sulfonate Additive Sulfopropyl Sulfonate in Acid Copper Electroplating Chemistries , 2003 .
[2] C. Mele,et al. Electrodeposition of Cu from Acidic Sulphate Solutions in the Presence of PEG: An Electrochemical and Spectroelectrochemical Investigation – Part I , 2006 .
[3] Derek Pletcher,et al. The chemistry of the additives in an acid copper electroplating bath: Part I. Polyethylene glycol and chloride ion , 1992 .
[4] J. Bockris,et al. Mechanism of electrodeposition and dissolution processes of copper in aqueous solutions , 1962 .
[5] P. V. Ham,et al. An Attempt to Quantify Electrodeposit Metallographic Growth Structures , 1997 .
[6] J. Bonevich,et al. Superconformal Electrodeposition of Copper in 500–90 nm Features , 2000 .
[7] G. Staikov,et al. Electrochemical phase formation and growth : an introduction to the initial stages of metal deposition , 1996 .
[8] A. Łukomska,et al. Potential of zero charge of monocrystalline copper electrodes in perchlorate solutions , 2004 .
[9] K. Kondo,et al. Copper damascene electrodeposition and additives , 2003 .
[10] Michel Keddam,et al. Impedance of fractal interfaces : new data on the Von Koch model. , 1988 .
[11] Richard C. Alkire,et al. Plating of Copper into Through‐Holes and Vias , 1989 .
[12] F. Walsh,et al. Effect of thiourea, benzotriazole and 4,5-dithiaoctane-1,8-disulphonic acid on the kinetics of copper deposition from dilute acid sulphate solutions , 1995 .
[13] Sang-Eun Bae,et al. In situ EC-STM studies of MPS, SPS, and chloride on Cu100: structural studies of accelerators for dual damascene electrodeposition. , 2006, Langmuir : the ACS journal of surfaces and colloids.
[14] P. Delahay,et al. Advances in Electrochemistry and Electrochemical Engineering , 1964 .
[15] T. R. Anthony,et al. Forming electrical interconnections through semiconductor wafers , 1981 .
[16] R. Denoyel,et al. Influence of additives on Cu electrodeposition mechanisms in acid solution: direct current study supported by non-electrochemical measurements , 2002 .
[17] Panayotis C. Andricacos,et al. Damascene copper electroplating for chip interconnections , 1998, IBM J. Res. Dev..
[18] P. Searson,et al. Electrochemical Characterization of Adsorption-Desorption of the Cuprous-Suppressor-Chloride Complex during Electrodeposition of Copper , 2006 .
[19] P. Moçotéguy,et al. Mechanism of copper deposition in a sulphate bath containing chlorides , 2004 .
[20] Richard C. Alkire,et al. Advances in electrochemical science and engineering , 1990 .
[21] K. Kondo,et al. Role of Additives for Copper Damascene Electrodeposition Experimental Study on Inhibition and Acceleration Effects , 2004 .
[22] A. Arvia,et al. A new polymeric [Cu(SO3(CH2)3S–S(CH2)3SO3)(H2O)4]n complex molecule produced from constituents of a super-conformational copper plating bath: Crystal structure, infrared and Raman spectra and thermal behaviour , 2007 .
[23] A. Arvia,et al. Kinetics and mechanism of the electrochemical oxidation of nitrite ion dissolved as sodium nitrite in dimethylsulphoxide solutions on platinum electrodes , 1972 .
[24] D. Berg,et al. Underpotential deposition of thallium(I) on electropolished copper in aqueous solutions , 1993 .
[25] Brian E. Conway,et al. Modern Aspects of Electrochemistry , 1974 .
[26] D. Barkey,et al. Kinetic selection of morphology and growth velocity in electrochemical deposition , 1998 .
[27] J. N. Lambi,et al. Electrochemical impedance spectroscopy of thiourea electro-oxidation on copper electrodes in aqueous 0.5 M sulphuric acid , 2002 .
[28] A. J. Arvia,et al. Monte Carlo Simulations of Solid 2D Phase Growth on 1D Solid Substrates with Square-Wave Surface Profiles. Influence of Hole Design and Depositing Particle Surface Diffusion , 2006, Monte Carlo Methods Appl..
[29] Andrew A. Gewirth,et al. Inhibition due to the interaction of polyethylene glycol, chloride, and copper in plating baths: A surface-enhanced Raman study , 2003 .
[30] A. West,et al. Three-Additive Model of Superfilling of Copper , 2001 .
[31] Claude Gabrielli,et al. A model for copper deposition in the damascene process , 2006 .
[32] T. Moffat,et al. Competitive Adsorption of PEG, Cl − , and SPS/MPS on Cu: An In Situ Ellipsometric Study , 2006 .
[33] D. Pletcher,et al. The chemistry of the additives in an acid copper electroplating bath: Part III. The mechanism of brightening by 4,5-dithia-octane-1, 8-disulphonic acid , 1992 .
[34] J. Bockris,et al. Galvanostatic studies of the kinetics of deposition and dissolution in the copper + copper sulphate system , 1959 .
[35] H. Thirsk,et al. The rate-determining step in the electro-deposition of copper on copper from aqueous cupric sulphate solutions , 1965 .
[36] W. Plieth. Additives in the electrocrystallization process , 1992 .
[37] T. Moffat,et al. Superconformal electrodeposition in submicron features. , 2001, Physical review letters.
[38] K. Kondo,et al. Surface Adsorption of PEG and Cl − Additives for Copper Damascene Electrodeposition , 2005 .
[39] Ricardo M. Souto,et al. The electrochemical faceting of copper in 85% aqueous o-phosphoric acid by using a potential reversal technique , 1994 .
[40] W. Dow,et al. Roles of Chloride Ion in Microvia Filling by Copper Electrodeposition I. Studies Using SEM and Optical Microscope , 2005 .
[41] Allen J. Bard,et al. Encyclopedia of Electrochemistry of the Elements , 1978 .
[42] R. Woods,et al. Transient Adsorption of Sulfate Ions during Copper Electrodeposition , 2004 .
[43] Derek Pletcher,et al. The chemistry of the additives in an acid copper electroplating bath , 1992 .
[44] A. Arvia,et al. Influence of Additives on the Growth Velocity and Morphology of Branching Copper Electrodeposits , 2005 .
[45] Alan C. West,et al. A Superfilling Model that Predicts Bump Formation , 2001 .
[46] A. Arvia,et al. Anodisation of copper in thiourea- and formamidine disulphide-containing acid solution.: Part I. Identification of products and reaction pathway , 2001 .
[47] C. Mele,et al. Electrodeposition of Cu from Acidic Sulfate Solutions in the Presence of Bis-(3-sulfopropyl)-disulfide (SPS) and Chloride Ions , 2006 .
[48] D. M. Soares,et al. Copper ion reduction catalyzed by chloride ions , 2002 .
[49] O. Magnussen. Ordered anion adlayers on metal electrode surfaces. , 2002, Chemical reviews.
[50] V. Jović,et al. Copper electrodeposition from a copper acid baths in the presence of PEG and NaCl , 2001 .
[51] R. D. Levie,et al. Fractals and rough electrodes , 1990 .
[52] Wei-Ping Dow,et al. Roles of chloride ion in microvia filling by copper electrodeposition -II. Studies using EPR and galvanostatic measurements , 2005 .
[53] A. Gewirth,et al. Influence of Additives on Copper Electrodeposition on Physical Vapor Deposited (PVD) Copper Substrates , 2003 .
[54] D. Barkey,et al. Faceting and Roughening Transitions on Copper Single Crystals in Acid Sulfate Plating Baths with Chloride , 2000 .
[55] T. Moffat,et al. Superconformal Electrodeposition in Vias , 2002 .
[56] R. Adzic. Electrocatalysis on Surfaces Modified by Foreign Metal Adatoms , 1979 .
[57] B. Grgur,et al. Physical and mathematical models of an inert macroelectrode modified with active hemispherical microelectrodes , 2007 .
[58] Soo‐Kil Kim,et al. Catalytic behavior of 3-mercapto-1-propane sulfonic acid on Cu electrodeposition and its effect on Cu film properties for CMOS device metallization , 2003 .
[59] T. Moffat,et al. Electrodeposition of Copper in the SPS-PEG-Cl Additive System I. Kinetic Measurements: Influence of SPS , 2004 .
[60] Zachary D. Schultz,et al. Vibrational Spectroscopic and Mass Spectrometric Studies of the Interaction of Bis(3-sulfopropyl)-disulfide with Cu Surfaces , 2006 .
[61] Panayotis C. Andricacos,et al. The chemistry of additives in damascene copper plating , 2005, IBM J. Res. Dev..
[62] Alan C. West,et al. Copper Deposition in the Presence of Polyethylene Glycol I. Quartz Crystal Microbalance Study , 1998 .
[63] E. Chassaing,et al. Epitaxial growth and electrode impedance of copper electrodeposits , 1984 .