Characterization of super-harmonic effect using piezoelectric film cantilever with a proof mass in the point

The super-harmonic effect has been studied using a piezoelectric micro-cantilever with a proof mass. The fabricated prototype device, comprised with a multilayer of Pt/Ti/PZT/Pt/Ti/SiO2 deposited on a silicon-on-insulator (SOI) wafer, has been measured to have an eigenstate frequency of around 816 Hz. The driven frequencies of 204, 272, 409 and 816 Hz have been then converted into the resonant one via the super-harmonic vibration, corresponding to a sudden increase of output voltage, based on our preliminary characterizations.

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