Study on Reliability and Cushion for Micro Accelerometer in Shock Environment

The main failure modes and failure mechanisms of micro accelerometer in shock environment were experimentally investigated,and the results show that the main reason is the fracture of the elastic beams.The effect of micro-fabrication on the fracture of beams was discussed.The practicability of using stopper to increase the reliability of micro accelerometer was validated.Furthermore,metal rubber was adopted as the protection for the micro accelerometer,and experimental results proved that it can significantly enhance the anti-shock capability and reliability of micro accelerometer.