Micro-biosensing technology based on MEMS

MEMS has become a supporting technology in the research of micro-biosensor,biochip and biomedical SOC(system-on-a-chip) which have the advantages of miniaturization,low cost and good sensitivity.A review is given about the technologies of bioMEMS and the principle,structure,classification and application of micro-biosensors and biochips are summarized.And their development and application prospect are inquired into.