论文信息 - Correction to "Real-Time Carbon Content Control for PECVD ZrO $_2$ Thin-Film Growth" - 字舞流文

Correction to "Real-Time Carbon Content Control for PECVD ZrO $_2$ Thin-Film Growth"

Panagiotis D. Christofides | Yiming Lou | Jane P. Chang | P. Christofides | Yiming Lou | D. Ni | Dong Ni | Lijie Sha | Shihong Lao | L. Sha | S. Lao

[1] P. Christofides,et al. Real-time carbon content control for PECVD ZrO/sub 2/ thin-film growth , 2004, IEEE Transactions on Semiconductor Manufacturing.