论文信息 - Fabrication of sub‐100‐nm linewidth periodic structures for study of quantum effects from interference and confinement in Si inversion layers - 字舞流文

Fabrication of sub‐100‐nm linewidth periodic structures for study of quantum effects from interference and confinement in Si inversion layers

Henry I. Smith | E. Anderson | D. Antoniadis | A. C. Warren | M. Schattenburg | I. Plotnik