Apparatus and method for automatically correcting erroneous sampling signals incremental position measuring

Arrangement for the automatic correction of faulty scanning incremental position measuring wherein the input side at least one pair of phase-shifted, abut analog scanning signals that are associated with certain deviations from the ideal waveform, with an ideal waveform is provided by a downstream evaluation unit, with - a processor unit which is supplied with the analog scanning signals and will be determined by means of a correction algorithm correction variables, which in turn are converted into corresponding control signals, - a correction unit to which the analog scanning signals and the control signals are supplied, and the multiple alignment options comprises to correct by the application of the control signals the faulted scan signals, wherein a pair of phase-shifted sensing signals (S1 ', S2') with respect to the signal amplitudes, the DC voltage components and their relative phase position can be corrected, and - the processor unit (5) and the correction unit (6) are arranged so that, on the processor unit (5) applied on the input side analog scanning signals (S1 ', S2') which have already passed the correction unit (6) and - in the processor unit ...

[1]  P L Heydemann,et al.  Determination and correction of quadrature fringe measurement errors in interferometers. , 1981, Applied optics.

[2]  K. P. Birch,et al.  Optical fringe subdivision with nanometric accuracy , 1990 .

[3]  Jing Jiang,et al.  Autocorrection of interpolation errors in optical encoders , 1996, Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.