论文信息 - A high speed precision automatic ellipsometer

A high speed precision automatic ellipsometer

Abstract An ellipsometer is described which can measure the characteristics of a film in 0.02 sec. Fifty data points per second are generated. Azimuth can be measured with an accuracy of 0.01°.

B. D. Cahan | B. Cahan | R. Spanier | R. F. Spanier

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