论文信息 - Novel crack propagation in PECVD-deposited dielectric thin films - 字舞流文

Novel crack propagation in PECVD-deposited dielectric thin films

Tae-Hyun Kim | R. Elliman | M. Spooner | A. Wilkinson | T.D.M. Weijers-Dall | S. Huth | V. Tobias