Integration of the anisotropic-silicon-etching program ASEP within the CAEMEMS CAD/CAE framework

The authors describe the inclusion, within a microelectromechanical-system (MEMS)-specific computer-aided-design/computer-aided-engineering (CAD/CAE) framework, of a MEMS-related CAD tool that was developed independently of the framework. The tool, ASEP (anisotropic silicon etching program), simulates the etching of

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