Performance Test of 3D MEMS Micro Tactile Sensor for Dimension Measurement of Microstructure

The performance test about a 3D micro-electro-mechanical system(MEMS) micro tactile sensor for dimension measurement of micro structure is carried out.The performance of the sensor is evaluated comprehensively.To measure the output signal of the sensor,a 3D differential arrangement of 16 piezo-resistors on beam is presented,accordingly,the measuring method of Wheatstone bridge of piezoresistor and circuit for weak signal condition are developed.The 3D performance test method based on the precision coordinate platform is studied,and a test setup is introduced.Through the experiments,the performance of the sensors is verified with resolution of 100 nm,measuring range of 4.7 μm,linearity of ±0.15%,cross-talk between x/y and z direction of 0.5% in axial direction,and resolution of 100 nm,linearity of ±0.37%.