Sub-μg Ultra-Low-Noise MEMS Accelerometers Based on CMOS-Compatible Piezoelectric AlN Thin Films
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Y. Manoli | F. Gerfers | M. Kohlstadt | H. Bar | L.-P. Wang | Y. Manoli | M. He | F. Gerfers | M.-Y. He | L.-P. Wang | M. Kohlstadt | H. Bar
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