A Multi-layer Eddy Current Micro Sensor For Non-destructive Inspection Of Small Diameter Pipes

We have developed a multi-layer eddy current micro sensor. The dimension of the sensor is 3mm x 3mm x 80 pm. It was composed of one to four layers of micro spiral coil made of 10 x 10 pm2 copper lines. The number of turn in each layer is 40 turns. In the present work, we report on the fabrication and the evaluation of multi-layer eddy current micro sensors in both experiments and 3D FEM analysis.

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