p-type behavior in phosphorus-doped (Zn,Mg)O device structures

The characteristics of device structures that employ phosphorus-doped (Zn,Mg)O have been examined in a effort to delineate the carrier type behavior in this material. The capacitance–voltage properties of metal/insulator/P-doped (Zn,Mg)O diode structures were measured and found to exhibit a polarity consistent with the P-doped (Zn,Mg)O layer being p type. In addition, thin-film junctions comprising n-type ZnO and P-doped (Zn,Mg)O display asymmetric I–V characteristics that are consistent with the formation of a p–n junction at the interface. Although Hall measurements of the P-doped (Zn,Mg)O thin films yielded an indeterminate Hall sign due to a small carrier mobility, these results are consistent with previous reports that phosphorus can yield an acceptor state and p-type behavior in ZnO materials.

[1]  A. Lusson,et al.  Electrical activity of nitrogen acceptors in ZnO films grown by metalorganic vapor phase epitaxy , 2003 .

[2]  Sokrates T. Pantelides,et al.  Acceptor doping in ZnSe versus ZnTe , 1993 .

[3]  Dali Liu,et al.  Epitaxial growth of NH3-doped ZnO thin films on 〈〉 oriented sapphire substrates , 2003 .

[4]  J. Narayan,et al.  Rectifying electrical characteristics of La0.7Sr0.3MnO3/ZnO heterostructure , 2003 .

[5]  H. Ruda Widegap II–VI Compounds for Opto-electronic Applications , 1992 .

[6]  Z. Ye,et al.  Growth of N-doped p-type ZnO films using ammonia as dopant source gas , 2003 .

[7]  E. H. Nicollian,et al.  Mos (Metal Oxide Semiconductor) Physics and Technology , 1982 .

[8]  Z. Ye,et al.  p-type ZnO films deposited by DC reactive magnetron sputtering at different ammonia concentrations , 2003 .

[9]  Norihiko Tamaki,et al.  Ferroelectric properties in piezoelectric semiconductor Zn1-xMxO (M=Li, Mg) , 1997 .

[10]  Hiroshi Katayama-Yoshida,et al.  Solution Using a Codoping Method to Unipolarity for the Fabrication of p-Type ZnO , 1999 .

[11]  Atsushi Ashida,et al.  Ferroelectricity in Li-Doped ZnO:X Thin Films and their Application in Optical Switching Devices , 2001 .

[12]  Koji Yano,et al.  Growth of p-type Zinc Oxide Films by Chemical Vapor Deposition , 1997 .

[13]  K. Ebihara,et al.  Synthesis of p-type ZnO thin films using co-doping techniques based on KrF excimer laser deposition , 2003 .

[14]  Hideo Hosono,et al.  Fabrication and photoresponse of a pn-heterojunction diode composed of transparent oxide semiconductors, p-NiO and n-ZnO , 2003 .

[15]  Giancarlo Battaglin,et al.  Preparation and characterization of Li‐doped ZnO films , 1991 .

[16]  Kakuya Iwata,et al.  Nitrogen-induced defects in ZnO : N grown on sapphire substrate by gas source MBE , 2000 .

[17]  A. R. Hutson Hall Effect Studies of Doped Zinc Oxide Single Crystals , 1957 .

[18]  Suhuai Wei,et al.  Origin of p -type doping difficulty in ZnO: The impurity perspective , 2002 .

[19]  T. S. Lee,et al.  Properties of arsenic-doped p-type ZnO grown by hybrid beam deposition , 2003 .

[20]  H. R. Chandrasekhar,et al.  Optical and structural properties of ZnO films deposited on GaAs by pulsed laser deposition , 2000 .

[21]  John F. Muth,et al.  Dominance of tunneling current and band filling in InGaN/AlGaN double heterostructure blue light‐emitting diodes , 1996 .

[22]  S T Pantelides,et al.  Control of doping by impurity Cchemical potentials: predictions for p-type ZnO. , 2001, Physical review letters.

[23]  D. Look,et al.  Residual Native Shallow Donor in ZnO , 1999 .

[24]  J. A. Savage,et al.  Vapour growth of Cu and Li-doped single crystal zinc oxide in the resistivity range 50 to 103 ohm cm , 1969 .

[25]  G. Weise,et al.  Preparation, characterization and properties of pure and lithium-doped zinc oxide thin films , 1976 .

[26]  Frank Henecker,et al.  Hydrogen: a relevant shallow donor in zinc oxide. , 2002, Physical review letters.

[27]  Matthew Young,et al.  Chemical vapor deposition-formed p-type ZnO thin films , 2003 .

[28]  V. Walle,et al.  Hydrogen as a cause of doping in zinc oxide , 2000 .

[29]  David P. Norton,et al.  Transport properties of phosphorus-doped ZnO thin films , 2003 .

[30]  Herbert Wolf,et al.  Acceptors and Donors in the Wide-Gap Semiconductors ZnO and SnO2 , 1986 .

[31]  Tomoji Kawai,et al.  Pulsed laser reactive deposition of p-type ZnO film enhanced by an electron cyclotron resonance source , 2001 .

[32]  Ilgu Yun,et al.  Formation of p-type ZnO film on InP substrate by phosphor doping , 2003 .

[33]  P. H. Kasai,et al.  Electron Spin Resonance Studies of Donors and Acceptors in ZnO , 1963 .

[34]  Yasuo Kanai,et al.  Admittance Spectroscopy of ZnO Crystals Containing Ag , 1991 .

[35]  V. Dmitriev,et al.  GaN Based p-n Structures Grown on SiC Substrates , 1996 .

[36]  D. Hwang,et al.  Effects of RF power variation on properties of ZnO thin films and electrical properties of p-n homojunction , 2003 .

[37]  Yasuo Kanai,et al.  Admittance Spectroscopy of Cu-Doped ZnO Crystals , 1991 .

[38]  Jay M. Shah,et al.  Experimental analysis and theoretical model for anomalously high ideality factors (n≫2.0) in AlGaN/GaN p-n junction diodes , 2003 .

[39]  Hyun-Sik Kim,et al.  Realization of p-type ZnO thin films via phosphorus doping and thermal activation of the dopant , 2003 .

[40]  I. Suemune,et al.  Nitrogen-Doped p-Type ZnO Layers Prepared with H2O Vapor-Assisted Metalorganic Molecular-Beam Epitaxy , 2002 .

[41]  D. C. Reynolds,et al.  Production of nitrogen acceptors in ZnO by thermal annealing , 2002 .

[42]  D. C. Reynolds,et al.  Characterization of homoepitaxial p-type ZnO grown by molecular beam epitaxy , 2002 .

[43]  Chris G. Van de Walle,et al.  Strategies for Controlling the Conductivity of Wide-Band-Gap Semiconductors , 2002 .

[44]  H. Ohta,et al.  Near-UV emitting diodes based on a transparent p-n junction composed of heteroepitaxially grown p-SrCu2O2 and n-Zno , 2002 .

[45]  Petr G. Eliseev,et al.  Low-temperature study of current and electroluminescence in InGaN/AlGaN/GaN double-heterostructure blue light-emitting diodes , 1996 .

[46]  M. Jayaraj,et al.  Electrical characterization of transparent p–i–n heterojunction diodes , 2001 .

[47]  Sang Hyuck Bae,et al.  Effects of native defects on optical and electrical properties of ZnO prepared by pulsed laser deposition , 2000 .

[48]  Toru Aoki,et al.  ZnO diode fabricated by excimer-laser doping , 2000 .

[49]  Hideo Hosono,et al.  Fabrication and characterization of heteroepitaxial p-n junction diode composed of wide-gap oxide semiconductors p-ZnRh2O4/n-ZnO , 2003 .

[50]  E. A. Davis,et al.  Shallow versus deep hydrogen states in ZnO and HgO , 2001 .