Automatic Topography Using High Precision Digital Moire Methods

Three types of moire topographic methods using digital techniques are proposed. Deformed gratings obtained by projecting a reference grating onto an object under test are subjected to digital analysis. The electronic analysis procedures of deformed gratings described here enable us to distinguish between depression and elevation of the object, so that automatic measurement of 3-D shapes and automatic moire fringe interpolation are performed. Based on the digital moire methods, we have developed a practical measurement system, with a linear photodiode array on a micro-stage as a scanning image sensor. Examples of fringe analysis in medical applications are presented.