High performance graphene oxide-based humidity sensor integrated on a photonic crystal cavity

We report a high performance relative humidity (RH) microsensor based on a few-layer graphene oxide (GO) flake coated photonic crystal (PC) cavity. Since the GO layer is highly water-reactive and interacts with the evanescent cavity mode strongly, the exposure of the GO-PC cavity in varied humidity levels results in significant resonant wavelength shifts, showing a slope of 0.68 nm/%RH in the range of 60%–85%RH. By monitoring the power variation of the cavity reflection, the microsensor presents an ultrahigh sensitivity exceeding 3.9 dB/%RH. Relying on the unimpeded permeation of water molecules through the GO interlayers and microscale distribution of the cavity mode, the integrated sensor has a response time less than 100 ms, which promises successful measurements of human breathing. Combining with the ease of fabrication, this high performance RH sensor provides great potentials in applications requiring optical access, device compactness, and fast dynamic response.

[1]  Limin Tong,et al.  Fast detection of humidity with a subwavelength-diameter fiber taper coated with gelatin film. , 2008, Optics express.

[2]  Haiying Shen,et al.  TOP , 2019, Encyclopedia of Autism Spectrum Disorders.

[3]  Dirk Englund,et al.  High-speed electro-optic modulator integrated with graphene-boron nitride heterostructure and photonic crystal nanocavity. , 2014, Nano letters.

[4]  A. M. van der Zande,et al.  Regenerative oscillation and four-wave mixing in graphene optoelectronics , 2012, Conference on Lasers and Electro-Optics.

[5]  Gang-Ding Peng,et al.  Optical fibre temperature and humidity sensor , 2010 .

[6]  Bin Liu,et al.  Sensing behavior of atomically thin-layered MoS2 transistors. , 2013, ACS nano.

[7]  M. Moreno-Bondi,et al.  Humidity sensing with a luminescent Ru(II) complex and phase-sensitive detection , 2006 .

[8]  Zach DeVito,et al.  Opt , 2017 .

[9]  Jr.,et al.  Enhanced photodetection in graphene-integrated photonic crystal cavity , 2013, 1311.2080.

[10]  P. Vicente,et al.  A fibre-optic humidity sensor based on a porous silica xerogel film as the sensing element , 2010 .

[11]  W. Wong,et al.  Polyvinyl alcohol coated photonic crystal optical fiber sensor for humidity measurement , 2012 .

[12]  Hao Zhang,et al.  Relative Humidity Sensor Based on Tilted Fiber Bragg Grating With Polyvinyl Alcohol Coating , 2009 .

[13]  I. Grigorieva,et al.  Unimpeded Permeation of Water Through Helium-Leak–Tight Graphene-Based Membranes , 2011, Science.

[14]  Jianlin Zhao,et al.  High-performance humidity sensor based on a polyvinyl alcohol-coated photonic crystal cavity. , 2016, Optics letters.

[15]  Ignacio R. Matias,et al.  A fibre optic humidity sensor based on a long-period fibre grating coated with a thin film of SiO2 nanospheres , 2009 .

[16]  D. Englund,et al.  A high-resolution spectrometer based on a compact planar two dimensional photonic crystal cavity array , 2012 .

[17]  Limin Tong,et al.  Fiber optic relative humidity sensor based on the tilted fiber Bragg grating coated with graphene oxide , 2016 .

[18]  Jun Zhang,et al.  Tungsten disulfide (WS2) based all-fiber-optic humidity sensor. , 2016, Optics express.

[19]  Vibhor Singh,et al.  Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping , 2013, 1311.4829.

[20]  A. Fischer,et al.  Resistive graphene humidity sensors with rapid and direct electrical readout , 2015, Nanoscale.

[21]  Dirk Englund,et al.  High-contrast electrooptic modulation of a photonic crystal nanocavity by electrical gating of graphene. , 2012, Nano letters.

[22]  Peng Zu,et al.  Humidity Sensor Based on a Multimode-Fiber Taper Coated With Polyvinyl Alcohol Interacting With a Fiber Bragg Grating , 2012, IEEE Sensors Journal.

[23]  Imre Dékány,et al.  Hydration behavior and dynamics of water molecules in graphite oxide , 2006 .

[24]  B. Eggleton,et al.  Chip scale humidity sensing based on a microfluidic infiltrated photonic crystal , 2013 .

[25]  S. Khijwania,et al.  Zinc oxide nanoparticle-doped nanoporous solgel fiber as a humidity sensor with enhanced sensitivity and large linear dynamic range. , 2013, Applied optics.

[26]  Yuliya Semenova,et al.  A fiber bend based humidity sensor with a wide linear range and fast measurement speed , 2012 .

[27]  A. M. van der Zande,et al.  Controlling the spontaneous emission rate of monolayer MoS2 in a photonic crystal nanocavity. , 2013, Applied physics letters.

[28]  Dirk Englund,et al.  Strong enhancement of light-matter interaction in graphene coupled to a photonic crystal nanocavity. , 2012, Nano letters.

[29]  Silvina Cerveny,et al.  Dynamics of Water Intercalated in Graphite Oxide , 2010 .

[30]  J. Bravo,et al.  Optical Fiber Humidity Sensors Using Nanostructured Coatings of SiO$_{2}$ Nanoparticles , 2008, IEEE Sensors Journal.

[31]  P. Steerenberg,et al.  Targeting pathophysiological rhythms: prednisone chronotherapy shows sustained efficacy in rheumatoid arthritis. , 2010, Annals of the rheumatic diseases.

[32]  Steven G. Johnson,et al.  Photonic Crystals: Molding the Flow of Light , 1995 .

[33]  Francisco J. Arregui,et al.  Optical fiber humidity sensors based on Localized Surface Plasmon Resonance (LSPR) and Lossy-mode resonance (LMR) in overlays loaded with silver nanoparticles , 2012 .

[34]  Fatemeh Khalili-Araghi,et al.  Stable and Selective Humidity Sensing Using Stacked Black Phosphorus Flakes. , 2015, ACS nano.

[35]  T. Baba,et al.  Enhancement of vertical emission in photonic crystal nanolasers , 2012 .

[36]  Jun Zhang,et al.  Reduced graphene oxide for fiber-optic humidity sensing. , 2014, Optics express.

[37]  Lin Gan,et al.  All-Optical Modulation of a Graphene-Cladded Silicon Photonic Crystal Cavity , 2015, CLEO 2015.

[38]  Gang-Ding Peng,et al.  Optical relative humidity sensor based on a hollow core-photonic bandgap fiber , 2012 .

[39]  T. L. Yeo,et al.  Characterisation of a polymer-coated fibre Bragg grating sensor for relative humidity sensing , 2005 .

[40]  Andrew G. Glen,et al.  APPL , 2001 .

[41]  D. Englund,et al.  Controlled Light–Matter Interaction in Graphene Electrooptic Devices Using Nanophotonic Cavities and Waveguides , 2014, IEEE Journal of Selected Topics in Quantum Electronics.

[42]  Paulo S. André,et al.  Optical Fiber Relative Humidity Sensor Based on a FBG with a Di-Ureasil Coating , 2012, Sensors.

[43]  Kefa Cen,et al.  Low-cost relative humidity sensor based on thermoplastic polyimide-coated fiber Bragg grating , 2007 .