Coarse andfine motion microrobotwithsixdegrees offreedom

p Abstract: Displacement of a microrobotis describedthree-dimensional displacement. Theschematic viewofthe theoretically andexperimentally. Thestructure ofthe Stewart-platform isshowninFigure 1.Thestructure isa robotisa Stewart-platform usingsixstacked-type well-known parallel link mechanism usedintheposition and piezoelectric actuators. Therobot, whichcanrealize a posture control ofarobot. Inthis paper, wedescribe the precise motion, isdeveloped fora flexible conveyingself-propelled displacement ofthemicrorobot, analyze system, suchasa desktop manufacturing system. The staticdisplacement, and demonstrate smallstatic robotisusedinamicro/nano system whichrequires a displacement withsixdegrees offreedom. nanometer resolution. We describe theprinciple ofthe motionanddemonstrate theself-propelled motionand 2.STRUCTURE OFMICROROBOT theprecise motion. Figure 2showsphotograph oftherobot. Thestructure ~~~~~~~~~~~~~~~~~(b) SideView