论文信息 - Atomic collision processes in sputtering

Atomic collision processes in sputtering

Abstract The time-of-flight spectra of sputtered atoms from gold crystals bombarded with 20 keV Ar+ ions are reported. The discussion shows the effect of channelling, direct and once-deflected recoils from the surface and focused collisions along and directions.

M. W. Thompson | I. Reid | B. Farmery

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