论文信息 - Technology Advances in Batch Production of Pt-Doped TiO2 Sol-Gel Oxygen Sensor

Technology Advances in Batch Production of Pt-Doped TiO2 Sol-Gel Oxygen Sensor

Aim of this work is the evaluation of a batch production fabrication run of a cheap sol-gel Pt-doped TiO2 thin film sensor on silicon substrate. The sensor is implemented as microsensors for lambda factor detection, while a preliminary investigation on real operative conditions shows that these devices perform a response time (t 90) in real condition around 1 second at 600 degC. Experimental tests in comparison with a commercial lambda probe were carried out

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