Tunable Dielectric Thin Films for HTS Microwave Applications

SrTiO 3 (STO) thin films are promising for a variety of applications requiring tunability. We describe the growth and characterization of STO thin films including their dielectric properties. We also present attempts at reducing the loss tangent of these films, and we discuss their integration with high-temperature superconductor (HTS) microwave filters for trimming purposes.

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