FABRICATED ON THE CAPILLARY SURFACE BY CYLINDRICAL PROJECTION LITHOGRAPHY FOR NMR APPLICATION

In the present work, a 3D gold microcoil has been directly fabricated on a capillary surface based on MEMS technology utilizing our new developed cylindrical projection lithography system. Compared with other hand winding, laser exposure and contact printing 3D microcoils, the one our reported can realize higher fabrication resolution and efficiency. As a result, this microcoil would greatly improve sensitivity of nuclear magnetic resonance (NMR) used in detecting mass-limited samples.