Pressure with vibrating membranes of the annular ring shaped type micro-speaker and a method of manufacturing the same
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The piezoelectric micro-speaker and a method of manufacturing the same are disclosed. Piezoelectric micro-speaker is disclosed, and includes a substrate having a cavity, a diaphragm formed on a substrate so as to cover the cavity. A first region of the diaphragm which is located in the center of the cavity is formed with a film of a first oscillation of the plurality of annular ring shape arranged concentrically. A second region of the diaphragm which is located at the edge portion of the cavity, the first and the diaphragm may be formed in the second vibration film made of a different material. Between a number of the first diaphragm and the upper surface it is provided with a piezoelectric driver for vibrating film a plurality of first vibration.