Micro-imaging performance of multilayers used as monochromators for coherent hard x-ray synchrotron radiation

We present a systematic study in which multilayers of different composition (W/Si, Mo/Si, Pd/B4C), periodicity (from 2.5 to 5.5 nm), and numbers of layers have been characterised. Particularly, we investigated the intrinsic quality (roughness and reflectivity) as well as the performance (flatness and coherence of the outgoing beam) as a monochromator for synchrotron radiation hard X-ray micro-imaging. The results indicate that the material composition is the dominating factor for the performance. This is of high importance for synchrotron-based hard X-ray imaging which has become a widely applied tool for probing the microstructure of bulk samples. The high spatial resolution and different contrast modalities available here strongly depend on using coherent beams from highly brilliant sources. In order to satisfy the demand for a high flux of quasi-monochromatic photons, multilayer-coated mirrors are commonly used as monochromators. Their properties present a good tradeoff between spectral bandwidth and photon flux density. Since the photon flux density at the sample position is higher than with standard crystal monochromators, better spatial resolution can be reached. This comes at the cost of reduced energy resolution and stronger non-uniformities in the incoming beam profile. By helping scientists and engineers specify the design parameters of multilayer monochromators, our results can contribute to a better exploitation of the advantages of multilayer monochromators over crystal-based devices; i.e., larger spectral bandwidth and high photon flux density for X-ray imaging.

[1]  A. Snigirev,et al.  On the possibilities of x-ray phase contrast microimaging by coherent high-energy synchrotron radiation , 1995 .

[2]  Frank Siewert,et al.  Fully automated, fixed exit, in vacuum double-multilayer monochromator for synchrotron-based hard X-ray micro-imaging applications , 2010 .

[3]  Simon Zabler,et al.  Coarsening of grain-refined semi-solid Al-Ge32 alloy: X-ray microtomography and in situ radiography , 2007 .

[4]  Brian P. Flannery,et al.  Observational strategies for three‐dimensional synchrotron microtomography , 1987 .

[5]  P. Cloetens,et al.  Holotomography: Quantitative phase tomography with micrometer resolution using hard synchrotron radiation x rays , 1999 .

[6]  Michael Krumrey,et al.  Multilayer x‐ray mirrors: Interfacial roughness, scattering, and image quality , 1993 .

[7]  Ch. Morawe,et al.  Thickness control of large area x-ray multilayers , 2009, Optical Engineering + Applications.

[8]  Stuart R. Stock,et al.  MicroComputed Tomography: Methodology and Applications , 2008 .

[9]  Eric Ziegler,et al.  The ESRF BM05 Metrology Beamline: Instrumentation And Performance Upgrade , 2004 .

[10]  R. Brooks,et al.  Statistical limitations in x-ray reconstructive tomography. , 1976, Medical physics.

[11]  Eberhard Spiller,et al.  Soft-x-ray optics , 1994, Optical Society of America Annual Meeting.

[12]  Eric Ziegler,et al.  Multilayers for high heat load synchrotron applications , 1995 .

[13]  Françoise Peyrin,et al.  Status and evolution of the ESRF beamline ID19 , 2010 .

[14]  Frank Siewert,et al.  Advanced metrology: an essential support for the surface finishing of high performance x-ray optics , 2005, SPIE Optics + Photonics.

[15]  Ch. Morawe,et al.  The new ESRF multilayer deposition facility , 2007, SPIE Optical Engineering + Applications.

[16]  Simon Zabler,et al.  The high-resolution synchrotron-based imaging stations at the BAMline (BESSY) and TopoTomo (ANKA) , 2008, Optical Engineering + Applications.

[17]  P Cloetens,et al.  Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging. , 2010, Journal of synchrotron radiation.

[18]  Jana Buchheim,et al.  Characterization and calibration of 2nd generation slope measuring profiler , 2010 .

[19]  Heinrich Riesemeier,et al.  The micro-imaging station of the TopoTomo beamline at the ANKA synchrotron light source , 2009 .

[20]  R. Brooks,et al.  Beam hardening in X-ray reconstructive tomography , 1976 .

[21]  Reiner Dietsch,et al.  Large area PLD of nanometer-multilayers , 2002 .

[22]  Simon Zabler,et al.  In situ investigation of the discharge of alkaline Zn–MnO2 batteries with synchrotron x-ray and neutron tomographies , 2007 .

[23]  S. Zabler,et al.  High resolution synchrotron-based radiography and tomography using hard X-rays at the BAMline (BESSY II) , 2008 .

[24]  T. Zeschke,et al.  The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY , 2004 .

[25]  Jan Sijbers,et al.  Reduction of ring artefacts in high resolution micro-CT reconstructions. , 2004, Physics in medicine and biology.

[26]  P Cloetens,et al.  Fractional Talbot imaging of phase gratings with hard x rays. , 1997, Optics letters.