论文信息 - Si emission from the SiO2/Si interface during the growth of SiO2 in the HfO2/SiO2/Si structure - 字舞流文

Si emission from the SiO2/Si interface during the growth of SiO2 in the HfO2/SiO2/Si structure

S. Kamiyama | Y. Nara | K. Torii | Motofumi Suzuki | K. Kimura | K. Nakajima | M. Uematsu | Zhao Ming | K. Yamada