论文信息 - Progress in Bulk 4H SiC Crystal Growth for 150 mm Wafer Production - 字舞流文

Progress in Bulk 4H SiC Crystal Growth for 150 mm Wafer Production

G. Chung | M. Dudley | B. Raghothamachar | Tuerxun Ailihumaer | I. Manning | Y. Matsuda | E. Sanchez