论文信息 - Charge-drift elimination in resonant electrostatic MEMS - 字舞流文

Charge-drift elimination in resonant electrostatic MEMS

R. Howe | T. Kenny | M. Hopcroft | S. Chandorkar | R. Melamud | R. Bahl | I. Bargatin | Bongsang Kim | G. Bahl | J. Salvia | S. Yoneoka