论文信息 - Athermal arrayed-waveguide grating multi/demultiplexers composed of TiO/sub 2/--SiO/sub 2/ waveguides on Si

Athermal arrayed-waveguide grating multi/demultiplexers composed of TiO/sub 2/--SiO/sub 2/ waveguides on Si

We have successfully demonstrated a novel athermal arrayed-waveguide grating (AWG), which is composed of highly TiO/sub 2/-doped SiO/sub 2/ glass rib waveguides on a silicon substrate. We found that the wavelength temperature coefficients of the athermal AWG depend not only on the TiO/sub 2/ concentration but also on the annealing temperature after fabrication. We obtained a center wavelength temperature coefficient of 0.7 pm//spl deg/C at a TiO/sub 2/ concentration of 66 mol% and an annealing temperature of 900/spl deg/C.

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