Magnetic field sensors based on thin film multi-layer structures

Abstract Thin film multi-layer structures were deposited and optimised for various low noise magnetic field sensors. Original bridge schemes have been tested for the magnetoresitive sensors, which are sensitive not only to amplitude but also to the magnetic field direction. Double-layer anisotropic magnetoresistive sensors have showed decreased hysteresis and lower influence of previous measurements. Deposited spin-dependent structures with antiferromagnetic fixing layer of Fe 50 Mn 50 had 30% magnetoresistive effect.