论文信息 - Direct Visual Observation of Powder Dynamics in Rf Plasma-Assisted Deposition

Direct Visual Observation of Powder Dynamics in Rf Plasma-Assisted Deposition

Contamination due to particles generated and suspended in silane rf plasmas is investigated. Powder is rendered visible by illumination of the reactor volume. This simple diagnostic for global, spatio‐temporal powder dynamics is used to study particle formation, trapping, and powder reduction by power modulation.

P. J. Paris | A. Howling | C. Hollenstein

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