High-Q RF-MEMS tunable evanescent-mode cavity filter

This paper presents a high-Q tunable evanescent-mode cavity filter using capacitive RF MEMS cantilever switches with a frequency coverage of 5.5–4.3 GHz. The filter results in an insertion loss of 2.6–5.3 dB over the tuning range and a 3-dB bandwidth of 55–40 MHz (fractional bandwidth of %1). The measured Qu of the filter is 511–273 over the frequency range, which is to our knowledge, the best report Q using RF-MEMS technology.

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