Large deformation balloon micro-actuator based on pyrotechnics on chip
暂无分享,去创建一个
D. Briand | L. Guillot | P. Dubois | U. Bley | L.-E. Bonjour
[1] Samuel Rosset,et al. Mechanical properties of electroactive polymer microactuators with ion-implanted electrodes , 2007, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.
[2] Michael Curt Elwenspoek,et al. Explosive Micro-Bubble Actuator , 2007 .
[3] Jin-Woo Choi,et al. A functional on-chip pressure generator using solid chemical propellant for disposable lab-on-a-chip , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.
[4] D. Briand,et al. Solid Propellant Microthrusters on Silicon: Design, Modeling, Fabrication, and Testing , 2006, Journal of Microelectromechanical Systems.
[5] M. Elwenspoek,et al. Explosive Micro-Bubble Actuator , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.