EML Array fabricated by SAG technique monolithically integrated with a buried ridge AWG multiplexer

Abstract We report the fabrication of a ten channel electroabsorption modulated DFB laser (EML) array. Different emission wavelengths of the laser array are obtained by selective area growth (SAG) technique, which is also used for the integration of electroabsorption modulators (EAM) with the lasers. An arrayed waveguide grating (AWG) combiner is integrated monolithically with the laser array by butt-joint regrowth (BJR) technique. A buried ridge waveguide structure is adopted for the AWG combiner. A self aligned fabrication procedure is adopted for the fabrication of the waveguide structure of the device to eliminate the misalignment between the laser active waveguide and the passive waveguide. A Ti thin film heater is integrated for each laser in the array. With the help of the heaters, ten laser emissions with 1.8 nm channel spacing are obtained. The integrated EAM has a larger than 11 dB static extinction ratios and larger than 8 GHz small signal modulation bandwidths. The light power collected in the output waveguide of the AWG is larger than −13 dBm for each wavelength.

[1]  Y. Okuno,et al.  Multi-wavelength DFB laser arrays grown by in-plane thickness control epitaxy , 1995, Seventh International Conference on Indium Phosphide and Related Materials.

[2]  Wei Wang,et al.  A modified SAG technique for the fabrication of DWDM DFB laser arrays with highly uniform wavelength spacings. , 2012, Optics express.

[3]  Zhendong Dai,et al.  Behavior and dynamics of gecko’s locomotion: The effects of moving directions on a vertical surface , 2011 .

[4]  S. Liang,et al.  Fabrication of Low-Cost Multiwavelength Laser Arrays for OLTs in WDM-PONs by Combining the SAG and BIG Techniques , 2015, IEEE Photonics Journal.

[5]  M. Aoki,et al.  Detuning adjustable multiwavelength MQW-DFB laser array grown by effective index/quantum energy control selective area MOVPE , 1994, IEEE Photonics Technology Letters.

[6]  Kiichi Hamamoto,et al.  Wavelength-selectable microarray light sources of multiple ranges simultaneously fabricated on single wafer , 2000 .

[7]  Wei Wang,et al.  Multichannel DFB Laser Arrays Fabricated by Upper SCH Layer SAG Technique , 2014, IEEE Journal of Quantum Electronics.

[8]  J. Coleman,et al.  Twelve-channel strained-layer InGaAs-GaAs-AlGaAs buried heterostructure quantum well laser array for WDM applications by selective-area MOCVD , 1994, IEEE Photonics Technology Letters.

[9]  Rajaram Bhat,et al.  Monolithic integration of multiwavelength compressive-strained multiquantum-well distributed-feedback laser array with star coupler and optical amplifiers , 1992 .

[10]  S. Kanazawa,et al.  1.3-μm, 4 × 25-Gbit/s, EADFB laser array module with large-output-power and low-driving-voltage for energy-efficient 100GbE transmitter. , 2012, Optics express.

[11]  S. Oh,et al.  A 10 × 10 Gb/s DFB laser diode array fabricated using a SAG technique. , 2014, Optics express.

[12]  Rajaram Bhat,et al.  Multiwavelength DFB laser arrays with integrated combiner and optical amplifier for WDM optical networks , 1997 .

[13]  Radhakrishnan Nagarajan,et al.  Large-Scale InP Transmitter PICs for PM-DQPSK Fiber Transmission Systems , 2010, IEEE Photonics Technology Letters.

[14]  Song Liang,et al.  The fabrication of 10-channel DFB laser array by SAG technology , 2013 .

[15]  Wei Wang,et al.  The Fabrication of Eight-Channel DFB Laser Array Using Sampled Gratings , 2010, IEEE Photonics Technology Letters.

[16]  Yang Wang,et al.  40-Gb/s Low Chirp Electroabsorption Modulator Integrated With DFB Laser , 2009 .

[17]  A. Sarangan,et al.  16-wavelength gain-coupled DFB laser array with fine tunability , 1996, IEEE Photonics Technology Letters.

[18]  Weiqi Wang,et al.  Multi-channel DFB laser arrays fabricated by SAG technology , 2013 .

[19]  P. Yu,et al.  High-saturation high-speed traveling-wave InGaAsP-InP electroabsorption modulator , 2001, IEEE Photonics Technology Letters.

[20]  M. Yamaguchi,et al.  10 wavelength MQW-DBR lasers fabricated by selective MOVPE growth , 1994 .