Fabrication of micro-gear shaft on micro-EDM

Micro Electrical Discharge Machining(micro-EDM) process and micro Wire Electrical Discharge Machining(micro-WEDM) process have been proven to be appropriate techniques for fabrication of three-dimensional micro parts and high aspect ratio micro structures.The structural feature of micro-gear shaft and the machining characteristics of micro-EDM and micro-WEDM were analyzed in this paper.Then a process flow for fabrication of micro-gear shaft was proposed,which combines micro-EDM and micro-WEDM,and the machining accuracy and efficiency were analyzed.A micro-gear shaft with pith diameter of 350 μm was fabricated by this method.