Zinc sulfide (ZnS) films were successfully grown by using mist chemical vapor deposition (mist-CVD) with fine-channel susceptor made of quartz. For the investigation of growth dynamics, two types of mist generators and two types of susceptors were prepared and distribu¬tion profiles of film thickness were examined.
Thermal efficiency of susceptor depends on heat¬penetration efficiency and line-velocity of the mists, which are influenced by the fine-channel gap-height of the susceptors. Using larger size of mists requires higher thermal efficiency in susceptor to obtain a flat thickness distribution. This result indicates that the optimization of the mist size and the susceptor structure is important for the film uniformity of grown films by the mist-CVD. (© 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)