초정밀 위치결정을 위한 6자유도미동기구의 궤적특성에 관한 연구

The purpose of this research is to examine precise linear motion and rotary motion. A six-degrees-of-freedom fine motion mechanism is introduced to drive an object precisely in directions of. X, Y and Z-axes and around them: three rectangular linear motion and rotary ones. An experimental mechanism is introduced in which a 70×70×70×(㎣) cube object is driven by six PZT actuator. The study is to establish the six-degrees-of-freedom fine motion mechanism of linear motion and rotary motion using PZT actuator.