Design of a High-Resolution Microfluidic Microwave Mems Phase Shifter

In this article, a novel microwave microelectromechanical phase shifter based on a microfluidic design is proposed and demonstrated.The design principles, the fabrication process, and experimental results (S-parameters and phase shift plots) are presented. The proposed system has a high bandwidth, high-power handling capacity, and a high-resolution along with a small settling time. © 2011 Wiley Periodicals, Inc. Microwave Opt Technol Lett, 2011; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.26127