论文信息 - Effects of annealing time and Si cap layer thickness on the Si/SiGe/Si heterostructures thermal stability - 字舞流文

Effects of annealing time and Si cap layer thickness on the Si/SiGe/Si heterostructures thermal stability

Fubao Gao | J. M. Li | M. Kong | Dianzhao Sun | Y. Zeng | J. Li | Lan-ying Lin | D. Huang | Ya-Fang Lin