Fabrication of silicon microstructures using a high-energy ion beam
暂无分享,去创建一个
Frank Watt | Andrew A. Bettiol | Mark B. H. Breese | Ee Jin Teo | Minghui Liu | Emmanuel P. Tavernier | Daniel J. Blackwood | M. Breese | A. Bettiol | Minghui Liu | F. Watt | E. Teo | D. Blackwood | E. Tavernier
[1] Leonard C. Feldman,et al. Materials analysis by ion channeling , 1982 .
[2] T. E. Bell,et al. Porous silicon as a sacrificial material , 1996 .
[3] L. Canham. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers , 1990 .
[4] Andrew A. Bettiol,et al. Three-dimensional nanolithography using proton beam writing , 2003 .
[5] Paul A. Kohl,et al. The Electrochemical Oxidation of Silicon and Formation of Porous Silicon in Acetonitrile , 1994 .
[6] Tony Zijlstra,et al. Fabrication of two-dimensional photonic crystal waveguides for 1.5 μm in silicon by deep anisotropic dry etching , 1999 .
[7] J. Samitier,et al. Electrochemical etching of porous silicon sacrificial layers for micromachining applications , 1997 .
[8] Róbert Juhász,et al. Formation of three-dimensional microstructures by electrochemical etching of silicon , 2001 .
[9] Bradley K. Smith,et al. A three-dimensional photonic crystal operating at infrared wavelengths , 1998, Nature.
[10] P. French,et al. Fabrication of mechanical structures in p-type silicon using electrochemical etching , 2000 .
[11] Andrew A. Bettiol,et al. The National University of Singapore high energy ion nano-probe facility: Performance tests☆ , 2003 .
[12] Peter Steiner,et al. Micromachining applications of porous silicon , 1995 .
[13] H. W. Lau,et al. High aspect ratio submicron silicon pillars fabricated by photoassisted electrochemical etching and oxidation , 1995 .
[14] Sumio Matsuda,et al. High-energy and high-fluence proton irradiation effects in silicon solar cells , 1996 .
[15] M. Blencowe. Nanoelectromechanical systems , 2005, cond-mat/0502566.
[16] H. Rothuizen,et al. Translating biomolecular recognition into nanomechanics. , 2000, Science.
[17] V. Lehmann. The Physics of Macropore Formation in Low Doped n‐Type Silicon , 1993 .
[18] Xu,et al. "Dip-Pen" nanolithography , 1999, Science.
[19] Albert Birner,et al. Structuring of Macroporous Silicon for Applications as Photonic Crystals , 2000 .
[20] H. Föll,et al. Formation Mechanism and Properties of Electrochemically Etched Trenches in n‐Type Silicon , 1990 .
[21] M. Roukes,et al. Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals , 1996 .