论文信息 - Design, simulation, and optimal control for the Fab 30 wafer fabrication facility

Design, simulation, and optimal control for the Fab 30 wafer fabrication facility

Abstract The paper introduces a methodology for the optimal control of stochastic discrete event dynamic systems (SDEDS). In this methodology, performance analysis (PA) techniques are used to design state observer of SDEDS. System identification, sensitivity analysis and predictive control techniques lead to an optimal control system design for SDEDS.

Heinz Westphal | Stephan Gramlich

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