Nanometer measurement of silicon wafer surface texture based on Fraunhofer diffraction pattern
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[1] Theodore V. Vorburger,et al. Measurements of Roughness of very Smooth Surfaces 1 1Contribution of the U. S. National Bureau of Standards, not subject to copyright, except for Figures 2-10 and 15, reprinted with permission from other sources. , 1987 .
[2] David J. Whitehouse. Comparison Between Stylus and Optical Methods for Measuring Surfaces , 1988 .
[3] B. Bhushan,et al. Measurement of surface topography of magnetic tapes by Mirau interferometry. , 1985, Applied optics.
[4] Nanotopography of Ultraprecise Ground Surface of Fine Ceramics Using Atomic Force Microscope , 1993 .