论文信息 - Effect of Cryogenic Dry Etching on Minority Charge Carrier Lifetime in Silicon - 字舞流文

Effect of Cryogenic Dry Etching on Minority Charge Carrier Lifetime in Silicon

A. Baranov | I. Morozov | A. Gudovskikh | D. Kudryashov | A. O. Monastyrenko | A. Monastyrenko