论文信息 - Microstructure and charge trapping in ZrO 2 - and Si 3 N 4 -based superlattice layer systems with Ge nanoparticles - 字舞流文

Microstructure and charge trapping in ZrO 2 - and Si 3 N 4 -based superlattice layer systems with Ge nanoparticles

J. Heitmann | R. Hübner | L. Rebohle | S. Prucnal | W. Skorupa | V. Klemm | D. Lehninger | S. Seidel