论文信息 - Fabrication of nanowires by varying energy microbeam lithography using heavy ions at the TIARA - 字舞流文

Fabrication of nanowires by varying energy microbeam lithography using heavy ions at the TIARA

T. Satoh | M. Oikawa | T. Kamiya | T. Ohkubo | Y. Ishii | S. Seki | H. Nishikawa | M. Sugimoto | J. Haga | N. Uchiya | Y. Furuta | K. Takano