Spin coating and plasma process for 2.5D integrated photonics on multilayer polymers

[1]  Philippe Grosso,et al.  High refractive index contrast in a photosensitive polymer and waveguide photo-printing demonstration , 2004 .

[2]  J. Zyss,et al.  Directional emission of stadium-shaped microlasers , 2006, physics/0609009.

[3]  J. Scheuer.  Fabrication and Characterization of Low-Loss Polymeric Waveguides and Micro-Resonators , 2006 .

[4]  M. Sadowski,et al.  Gaalas-based micromachined accelerometer , 2000 .

[5]  Joseph Zyss,et al.  Single-mode TE00-TM00 optical waveguides on SU-8 polymer , 2004 .

[6]  Polymeric MOEMS Variable Optical Attenuator , 2006, IEEE Photonics Technology Letters.

[7]  Joseph Zyss,et al.  SU-8 waveguiding interferometric micro-sensor for gage pressure measurement , 2007 .

[8]  C. Chan,et al.  Polymer surface modification by plasmas and photons , 1996 .

[9]  Asier Fullaondo,et al.  SDS‐CGE of proteins in microchannels made of SU‐8 films , 2006, Electrophoresis.

[10]  N. Grossard,et al.  Single-mode rib optical waveguides on SOG/SU-8 polymer and integrated Mach-Zehnder for designing thermal sensors , 2006, IEEE Sensors Journal.

[11]  Jian Zhang,et al.  Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS) , 2001 .

[12]  E. Toussaere,et al.  Polarization insensitive electro-optic polymer modulator , 2000 .

[13]  R. Hierle,et al.  Conception of optical integrated circuits on polymers , 2006, Microelectron. J..

[14]  Gwo-Bin Lee,et al.  Micro capillary electrophoresis chips integrated with buried SU-8/SOG optical waveguides for bio-analytical applications (vol 107, pg 125, 2003) , 2003 .

[15]  Ariela Donval,et al.  Electro-optic polymer based devices and technology for optical telecommunication , 2002 .

[16]  Shantanu Bhattacharya,et al.  Mechanics of plasma exposed spin-on-glass (SOG) and polydimethyl siloxane (PDMS) surfaces and their impact on bond strength , 2007 .

[17]  X. Letartre,et al.  InP-based MOEMS and related topics , 2000 .

[18]  M. Chaudhury,et al.  Interfacial Lifshitz-van der Waals and polar interactions in macroscopic systems , 1988 .

[19]  Gwo-Bin Lee,et al.  Micro flow cytometers with buried SU-8/SOG optical waveguides , 2003 .

[20]  Jae-Wook Kang,et al.  Simple and Low Cost Fabrication of Thermally Stable Polymeric Multimode Waveguides using a UV-curable Epoxy , 2003 .

[21]  A. Zebda,et al.  Surface energy and hybridization studies of amorphous carbon surfaces , 2008 .

[22]  C. Volpe,et al.  The solid surface free energy calculation. I. In defense of the multicomponent approach. , 2004, Journal of colloid and interface science.

[23]  C. V. Oss,et al.  Interfacial Forces in Aqueous Media , 1994 .