OMNIDIRECTIONAL WALKING MICROROBOT REALIZED BY THERMAL MICROACTUATOR ARRAYS

An omnidirectional mobile microrobot realized by microelectromechanical system (MEMS) actuator arrays is presented. The microrobot consists of two rigidly connected microcilia array chips, each having an 8 8 array of “motion pixels,” which are composed of four orthogonally oriented thermal bimorph actuators. This allows for reliable, accurate motion in three degrees of freedom x y θ in the plane, a first for a microrobot of this kind. The microrobot is approximately 3cm in length, 1cm in width, 1mm in height, and has a mass of less than half a gram. By varying the input power, actuation frequency and motion gait strategy the velocity of the chip can be precisely controlled. Motion in three degrees of freedom has been demonstrated and a maximum velocity of 635 µm/s and carrying capacity greater than 1.448 g (two 8-pin ICs) has been observed. The microrobot has been characterized extensively and a model for its performance is described.

[1]  Hiroyuki Fujita,et al.  Two dimensional micro conveyance system with through holes for electrical and fluidic interconnection , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[2]  Peter M. Will,et al.  Parts manipulation on an intelligent motion surface , 1995, Proceedings 1995 IEEE/RSJ International Conference on Intelligent Robots and Systems. Human Robot Interaction and Cooperative Robots.

[3]  John W. Suh,et al.  CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects , 1999 .

[4]  K.-F. Bohringer,et al.  A theory of manipulation and control for microfabricated actuator arrays , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[5]  Bruce Randall Donald,et al.  Vector fields for task-level distributed manipulation: experiments with organic micro actuator arrays , 1997, Proceedings of International Conference on Robotics and Automation.

[6]  Göran Stemme,et al.  A WALKING SILICON MICRO-ROBOT , 1999 .

[7]  Chih-Ming Ho,et al.  A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[8]  Bruce Randall Donald,et al.  Programmable Force Fields for Distributed Manipulation, with Applications to MEMS Actuator Arrays and Vibratory Parts Feeders , 1999, Int. J. Robotics Res..

[9]  P. Garda,et al.  A distributed microactuator conveyance system with integrated controller , 1999, IEEE SMC'99 Conference Proceedings. 1999 IEEE International Conference on Systems, Man, and Cybernetics (Cat. No.99CH37028).

[10]  K. Pister,et al.  A planar air levitated electrostatic actuator system , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[11]  Hiroyuki Fujita,et al.  Fabrication and operation of polyimide bimorph actuators for a ciliary motion system , 1993 .

[12]  Gregory T. A. Kovacs,et al.  THERMO-BIMORPH MICROCILIA ARRAYS FOR SMALL SPACECRAFT DOCKING , 2000 .

[13]  Thorbjörn Ebefors.  Polymide V-groove joints for three - dimensional silicon transducers , 2000 .

[14]  H. Fujita,et al.  Array-driven ultrasonic microactuators , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[15]  Hiroyuki Fujita,et al.  A conveyance system using air flow based on the concept of distributed micro motion systems , 1994 .

[16]  Y.C. Lee,et al.  Prototype microrobots for micro positioning in a manufacturing process and micro unmanned vehicles , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[17]  N. C. MacDonald,et al.  Single-crystal silicon actuator arrays for micro manipulation tasks , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[18]  Haruo Nakazawa,et al.  The two-dimensional micro conveyer: principles and fabrication process of the actuator , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[19]  Gregory T. A. Kovacs,et al.  Ciliary microactuator array for scanning electron microscope positioning stage , 1998 .

[20]  Gregory T. A. Kovacs,et al.  Organic thermal and electrostatic ciliary microactuator array for object manipulation , 1997 .