Micro combustion-thermionic power generation: feasibility, design and initial results
暂无分享,去创建一个
Chunbo Zhang | K. Najafi | K. Najafi | P. Washabaugh | Chunbo Zhang | L. Bernal | L.P. Bernal | P.D. Washabaugh
[1] Norman C. Tien,et al. Fabrication of thick silicon dioxide sacrificial and isolation blocks in a silicon substrate , 2002 .
[2] M. Schmidt,et al. Microfabrication of high-temperature silicon devices using wafer bonding and deep reactive ion etching , 1999 .
[3] George N. Hatsopoulos,et al. Thermionic energy conversion , 1966 .
[4] Xin Zhang,et al. A six-wafer combustion system for a silicon micro gas turbine engine , 2000, Journal of Microelectromechanical Systems.
[5] K. Najafi,et al. Localized silicon fusion and eutectic bonding for MEMS fabrication and packaging , 1998, Journal of Microelectromechanical Systems.