SURFACE CHARACTERIZATION OF SUPERPOLISHED SUBSTRATES FOR X-RAY AND NEUTRON MULTILAYER OPTICS

Ab stract Ex per i men tal re sults from sur face char ac ter iza tions of sub strates em ploy able in X-ray, and neu tron multilayer op tics are pre sented. A se lec tion of ma te ri als, fused sil ica, sil i con, borofloat and nickel, have been pre pared with a super-pol ished sur face rough ness by dif fer ent tech niques such as: lap ping pow ders; chem i cal etch ing; float ing and elec tro plat ing pro cess. The sur faces have been stud ied with top o graphic tech niques of op ti cal profilometry and Atomic Force Mi cros copy (AFM) in ad di tion to X-ray scat ter ing mea sure ments (XRS). Fractal be hav ior of these sam ples was an a lyzed by us ing an in verse power-law into a wide spa tial fre quency band width. Fractal pa ram e ters and rms rough ness are quan ti ties utilized in order to exhibit and compare the substrates quality.